Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Sergey Edward LyshevskiHardcover: 744 pages
Publisher: CRC Press; 2 edition (January 11, 2005)
Language: English
ISBN-10: 0849328381
ISBN-13: 978-0849328381
Product Dimensions: 10.1 x 7 x 1.7 inches
Shipping Weight: 3.3 pounds
Publisher: CRC Press; 2 edition (January 11, 2005)
Language: English
ISBN-10: 0849328381
ISBN-13: 978-0849328381
Product Dimensions: 10.1 x 7 x 1.7 inches
Shipping Weight: 3.3 pounds
Product Description
Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science. Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.
Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science. Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.